| 번호 | 사진 | 이름 | 크기 |
|---|---|---|---|
| 0040-21178 |
|
Quart'z Bellar (AL2O3) | 368*130 |
| 0020-26588 |
|
PC2 Shield | 328*51 |
| - |
|
Gas Trench Cover | 344*6 |
| 0020-24434 |
|
Pedestal | 190*9 |
| 0020-22844 |
|
Pedestal Shield | 225*4 |
| - |
|
Ceramic Insulator | 229*21 |
| 0015-20124 |
|
Ti Pedestal Screw | N/A |
| 3690-02569 |
|
Ti Shield Screw | N/A |
부품 수리
Endura 5500 Part List
Pre Clean (RF Etch)
Endura 5500 Part List
TiW Deposition
| 번호 | 사진 | 이름 | 크기 |
|---|---|---|---|
| 0020-23278 |
|
Upper Shield | 357*65 |
| 0020-23277 |
|
Lower Shield | 340*54 |
| 0021-22028 |
|
Pedestal | 235*8 |
| 0020-24914 |
|
Cover Ring | 269*27 |
| 0020-23041 |
|
Clamp Ring | 359*17 |
| 0020-21901 |
|
Braket | N/A |
| - |
|
Restbution & Washer | N/A |
Endura 5500 Part List
Au Deposition
| 번호 | 사진 | 이름 | 크기 |
|---|---|---|---|
| 0020-23278 |
|
Upper Shield | 357*65 |
| 0020-23277 |
|
Lower Shield | 340*54 |
| 0021-22028 |
|
Pedestal | 235*8 |
| 0020-24914 |
|
Cover Ring | 269*27 |
| 0020-23041 |
|
Clamp Ring | 359*17 |
| 0020-21901 |
|
Braket | N/A |
| - |
|
Restbution & Washer | N/A |
ASP+ Chamber 도면 요청물 (To EGT)
| 번호 | 사진 | 비고 |
|---|---|---|
|
0040-09661(CH.D) 0040-09662(CH.C) |
|
- |
| 0020-10187 |
|
- |
| 0020-31409 |
|
- |
| 0020-31763 |
|
- |
| 0020-09135 |
|
- |
| 0040-09574 |
|
- |
| 0040-09627 |
|
- |
| 0020-31554 |
|
- |
| 0040-09663 |
|
- |
| 0040-09845 |
|
- |
| 0040-09434 |
|
- |
| 0040-09401 |
|
- |
| 0020-31126 |
|
- |
| 0040-09404 |
|
- |
| 0040-09403 |
|
- |
| 0040-09402 |
|
- |
| 0040-09439 |
|
- |
| 0020-31519 |
|
- |
| 0020-09414 |
|
- |
| 0040-35483 |
|
- |
| 0040-09584 |
|
- |
| 0020-31480 |
|
- |
| 0020-31772 |
|
- |
| 0010-76700 |
|
- |
| 0020-30977 |
|
- |
| 0040-09525 |
|
- |
| 0020-31260 |
|
- |
| 0040-09115 |
|
- |
| 3370-01053 |
|
- |
| 0020-31122 |
|
- |
| 0021-35819 |
|
- |
| 0021-35822 |
|
- |
| 0021-10589 |
|
- |
| 0040-09558 |
|
- |
| 0040-32136 |
|
- |
| 0140-09122 |
|
- |
| 0040-09630 |
|
- |
| 0040-09632 |
|
- |
| 0040-09631 |
|
- |
| 0040-09629 |
|
- |
| 0020-31857 |
|
- |
| 0020-31771 |
|
- |
| 0040-35482 |
|
- |
| 0040-09684 |
|
- |
| 0040-09771 |
|
- |
| 0040-35481 |
|
- |
| 0040-09772 |
|
- |
| 0040-09681 |
|
- |
| 0020-31805 |
|
- |
| 0050-10047 |
|
- |
| 0050-10033 |
|
- |
| 3300-01904 |
|
- |
VIEW MORE
TxZ CH# Part's List
| 번호 | 사진 | 비고 |
|---|---|---|
| 0021-09760 REV. A |
|
- |
| 0021-35867 P4 |
|
- |
| WT08-SMT-121-00 |
|
- |
| WT08-SMT-124-00 |
|
- |
| WT08-SMT-125-00 |
|
- |
| WT08-SMT-128-01 |
|
- |
| WT08-SMT-131-01 |
|
- |
| WT08-SMT-130-03 |
|
- |
| WT08-SMT-129-01 |
|
- |
| WT08-SMT-133-00 |
|
- |
| txz chamber |
|
- |
|
VIEW MORE